Synthesis and Optoelectrical Properties of AlY Co-doped ZnO Transparent Conducting Thin Films

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Synthesis and Optoelectrical Properties of AlY Co-doped ZnO Transparent Conducting Thin Films

更新时间：2023-12-11

- Synthesis and Optoelectrical Properties of AlY Co-doped ZnO Transparent Conducting Thin Films
- Acta Scientiarum Naturalium Universitatis SunYatseni Vol. 50, Issue 6, Pages: 35-38(2011)
- 作者机构：
  
  1. 中山大学光电材料与技术国家重点实验室 // 物理科学与工程技术学院,广东,广州,510275
  2. 
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published：2011，
  
  Published Online：25 November 2011，
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Synthesis and Optoelectrical Properties of AlY Co-doped ZnO Transparent Conducting Thin Films. [J]. Acta Scientiarum Naturalium Universitatis SunYatseni 50(6):35-38(2011)
DOI：

Synthesis and Optoelectrical Properties of AlY Co-doped ZnO Transparent Conducting Thin Films. [J]. Acta Scientiarum Naturalium Universitatis SunYatseni 50(6):35-38(2011) DOI：

摘要

采用溶胶凝胶法，在玻璃衬底上制备出Al-Y共掺杂的ZnO透明导电薄膜。X射线衍射(XRD)表明，Al-Y共掺杂ZnO透明导电薄膜为六角纤锌矿结构的多晶薄膜，且具有C轴择优取向。制备的Al-Y共掺杂ZnO薄膜电阻率最小值为1.63×10

Ω·cm，在可见光区(400-800 nm)平均透过率超过85 %。

Abstract

The Al-Y co-doped ZnO tranparent conducting thin films were prepared on glass by Sol-Gel method. X-ray diffraction (XRD) showed they have hexagonal wurtzite structure with a C-axis preferred orientation. Its minimum resistivity is 1.63×10

Ω·cm

and the average transmittance in the visible region (400-800 nm) is beyond 85 %.

关键词

Al-Y共掺杂ZnO透明导电薄膜溶胶-凝胶

Keywords

Al-Y co-dopingZnO tranparent conducting filmSol-Gel method

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