Influence of Annealing Temperature on Structural and Optical Properties of Ce0.97Co0.03O2 Thin Films Prepared by Sol-Gel Method

YANG Shenghong; ZHANG Yueli

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Influence of Annealing Temperature on Structural and Optical Properties of Ce_0.97Co_0.03O₂ Thin Films Prepared by Sol-Gel Method

更新时间：2023-12-11

- Influence of Annealing Temperature on Structural and Optical Properties of Ce_0.97Co_0.03O₂ Thin Films Prepared by Sol-Gel Method
- Acta Scientiarum Naturalium Universitatis SunYatseni Vol. 53, Issue 3, Pages: 146-149(2014)
- 作者机构：
  
  中山大学光电材料与技术国家重点实验室∥物理科学与工程技术学院,广东,广州,510275
- 作者简介：
- 基金信息：
- DOI：
  CLC：
- Published：2014，
  
  Published Online：25 May 2014，
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YANG Shenghong, ZHANG Yueli. Influence of Annealing Temperature on Structural and Optical Properties of Ce_0.97Co_0.03O₂ Thin Films Prepared by Sol-Gel Method. [J]. Acta Scientiarum Naturalium Universitatis SunYatseni 53(3):146-149(2014)
DOI：

YANG Shenghong, ZHANG Yueli. Influence of Annealing Temperature on Structural and Optical Properties of Ce_0.97Co_0.03O₂ Thin Films Prepared by Sol-Gel Method. [J]. Acta Scientiarum Naturalium Universitatis SunYatseni 53(3):146-149(2014) DOI：

摘要

采用溶胶-凝胶法，在Si(100)衬底上制备了3%Co掺杂CeO

薄膜，研究了不同热处理温度对Ce

0.97

0.03

薄膜结构和光学性质的影响。X射线衍射(XRD)表明，3%Co掺杂CeO

薄膜为多晶薄膜，且未破坏CeO2原有的结构，随着退火温度的升高

晶粒尺寸逐渐增大。椭偏光谱法研究表明，Ce

0.97

0.03

薄膜的光学常数（折射率 n、消光系数 k）随着退火温度增加而增大，光学带隙 Eg 随退火温度增加而减小，这是薄膜结构随退火温度增加发生变化所致。

Abstract

3%Co doped CeO

thin films were prepared on Si(100) by SolGel method. The influence of annealing temperature on the structural and optical properties of Ce

0.97

0.03

thin films was studied. X-ray diffraction (XRD) showed that 3%Co doped CeO

thin films were polycryatalline with the same structure of CeO

The average crystallite size increased with increasing annealing temperature. Spectroscopic ellipsometry (SE) studies showed that the optical constants (the refractive index n and the extinction coefficient k) of Ce

0.97

0.03

thin films increase with increasing annealing temperature

and the optical band gap Eg decrease as increasing annealing temperature. The variation in optical properties with annealing temperature revealed that the film structure was affected by annealing.

关键词

3%Co掺杂CeO2薄膜溶胶-凝胶法光学性质

Keywords

3%Co doped CeO2thin filmsSol-Gel methodoptical properties

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